DEVICE FOR MANIPULATING MICRO- AND NANO-OBJECTS Russian patent published in 2020 - IPC B25J7/00 B81B3/00 H01H61/04 F03G7/06 B32B5/14 

FIELD: physics; machine building.

SUBSTANCE: invention relates to a device for manipulating micro- and nano-objects and a method of making a micromechanical actuator and can be used in radio electronics, machine building, biotechnology, electronic microscopy, medicine. Proposed device comprises micromechanical actuator with heating system. Actuator comprises fixed and movable flat elements arranged along its axis. Both elements are connected to one end of the actuator, and on the other end there is a grip for holding micro- or nano-objects. Actuator has an extended through hole in layered composite material with reversible EPR obtained by external energy beams (laser radiation, ion radiation or electric spark discharge in liquid flow) on the surface of the strip from the alloy with epoxy-plastic and including crystalline and amorphous layers with their continuous continuous connection at the boundary between them and the same chemical composition on both sides of the boundary. Hole is made so that the fixed element is crystalline, and the movable heat-sensitive element is amorphous-crystalline with an amorphous layer on the outer side of the actuator. Crystal layer with shape memory is pseudoplastic deformed, and amorphous layer is elastic. At the same time both elements are made with the possibility of reduction of the grip gap till complete closing of elements at heating and increase of the grip gap to the maximum value at cooling. Heating system includes a connector, on which by one end a cantilever with contacts is fixed, and on its other end there is a Peltier element, on the opposite side of which there is a heat-conducting plate with thermistor and a micromechanical actuator fixed on it, and the controller through the contacts on the cantilevers is electrically connected to the Peltier element and a thermistor.

EFFECT: control of actuator (micro pincer) by means of temperature control module based on Peltier elements makes it possible to maintain preset temperature or to develop preset mode of heating and cooling in time with high accuracy and speed.

5 cl, 7 dwg, 1 tbl