DEVICE FOR MANIPULATION OF MICRO-AND NANO-OBJECTS WITH STORAGE FUNCTION Russian patent published in 2019 - IPC B25J7/00 B32B5/14 B81B3/00 C21D9/52 F03G7/06 

FIELD: nanomechanics.

SUBSTANCE: invention relates to the field of mechanics, microsystem engineering and nano-mechanics, in particular, to the technique of devices based on materials with shape memory effect (SME), and can find application in the field of radio electronics, mechanical engineering, biotechnology, electron microscopy, and medicine. Device for manipulating micro- and nano-objects with the storage function includes a micromechanical actuator with a heating system, with the actuator containing fixed and movable flat elements located along its axis, the movable element is made of temperature-sensitive, consisting of two layers, and one of the layers is made of an alloy with shape memory effect, and the other is from elastic material, with both elements connected to one end of the actuator, and from the other end a gripper is formed to hold the micro or nano-objects. Device is characterized in that the micromechanical actuator is made by producing an extended through hole in a layered composite material with a reversible shape memory effect, the material includes crystalline and amorphous layers with their continuous inseparable compound on the border between them and the same chemical composition on both sides of the border, so that the fixed element is amorphous, and the movable temperature-sensitive element is amorphous-crystalline with a crystalline layer on the outer side of the actuator, the crystalline layer having shape memory and being pseudoplastic stretched, and the amorphous layer is elastic, while both elements are made with the possibility of increasing the capture gap to the maximum value with increasing temperature in the range of martensitic transformation in the crystalline layer and reducing the capture gap to the minimum value with decreasing temperature in the range of martensitic transformation in the crystalline layer; heating system is a temperature control module comprising a controller, a console with contacts, at least one Peltier element, a thermistor, a heat-conducting plate, a connector, configured to install the device on a micro- or nano-manipulator, a console with contacts is fixed on the connector at one end, and at the other end there is a Peltier element, on the opposite side of which there is a heat-conducting plate with a thermistor and a micromechanical actuator fixed on it, and the controller through the contacts on the console is electrically connected to the Peltier element and the thermistor. Method of manufacturing a micromechanical actuator is declared.

EFFECT: device improves the reliability and service life of the product through the use of a solid composite of the same material without mechanical connection of the layers, the device allows to solve problems for nanoobjects, hold objects for an unlimited time without the application of additional energy, realizing the function of storing micro- and nano-objects, the use of temperature control allows to maintain a given temperature or work out a given mode of heating and cooling over time with high accuracy and speed; all of the above provides enhanced functionality of the product.

5 cl, 8 dwg