MICROMECHANICAL DEVICE, METHOD FOR ITS MANUFACTURE AND SYSTEM FOR MANIPULATION OF MICRO-AND NANOOBJECTS Russian patent published in 2012 - IPC B81B3/00 F03G7/06 

FIELD: nanotechnology.

SUBSTANCE: invention may find application in electronics, mechanical engineering, nanotechnology, electron microscopy, and medicine. The invention is aimed at reducing the size, to expand the functionality by providing opportunities to manipulate the micro-and nano-objects, the possibility of deformation and processing of micro-and nano-objects, the possibility of compatibility the of the proposed system of manipulation of micro-and nano-objects with existing systems of surveillance, research and nano-manipulation, as well as to improve operating speed and simplify the technology of serial production, which is ensured by the fact that the device in accordance with the invention comprises two flat elements, at least one of which is made heat-sensitive and consists of two tightly interconnected layers, one of which is made of an alloy with the effect of the shape memory with pseudoplastic deformation of strain, and another - of an elastic material. The flat elements are connected at one end; a grip to hold the object of manipulation is formed on the other end. In the manufacture of the device a layer of an alloy with shape memory effect is pre-manufactured, and pseudoplastic deformation of strain is inserted in it, and then it is connected with the elastic layer, and the connecting of layers is carried out at a temperature below the martensitic transformation in an alloy with a shape memory effect.

EFFECT: system of manipulation of microobjects consists of micromechanical device mounted on the end of the microwire of the nanopositioner, working field with the manipulated object field and the source of heat in the form of a semiconductor laser, which radiation is focused onto the working field of the manipulation system including the end of the microwire with a tweezer.

19 cl, 7 dwg