HUMIDITY SENSOR AND GAS ANALYTICAL MULTISENSOR CHIP BASED ON TWO-DIMENSIONAL MOLYBDENUM CARBIDE (MAXENE) AND METHOD FOR THEIR MANUFACTURE Russian patent published in 2022 - IPC G01N27/12 B82Y40/00 

FIELD: gas analysis.

SUBSTANCE: invention relates to the field of gas analysis, namely to devices for detecting gas mixtures and methods for their manufacture. The method for manufacturing a humidity sensor and a multisensor chip includes the synthesis of two-dimensional structures of molybdenum carbide Mo₂CT_x (maxene) by the method proposed according to the invention, where T_x=O^-, OH^-, F^-, and applying them in the form of a layer on a dielectric substrate equipped with coplanar measuring electrodes.

EFFECT: invention provides for the manufacture of a highly sensitive chemoresistive type humidity sensor (when using two measuring electrodes) and a gas analytical multisensor chip (when using more than three electrodes); invention provides the possibility of manufacturing a new chemoresistive humidity sensor or a chemoresistive type multisensor chip based on a layer of two-dimensional molybdenum carbide Mo₂CT_x (maxene), which makes it possible to analyze the composition of air at room temperature FA, while the sensor is characterized by increased sensitivity to water vapor with a detection threshold of up to 10 ppm.

10 cl, 11 dwg