ORGANIC VAPOUR SENSOR AND GAS ANALYTICAL MULTISENSOR CHIP BASED ON OXIDISED TWO-DIMENSIONAL NIOBIUM CARBIDE (MXENE) AND METHOD OF THEIR MANUFACTURING Russian patent published in 2025 - IPC G01N27/12 

FIELD: measuring.

SUBSTANCE: invention relates to sensor engineering and micro- and nanotechnologies, namely to development of gas sensors. Method of making organic vapour sensor and multisensor chip involves synthesis of two-dimensional structures of niobium carbide Nb₂CT_x (MXene), where T_x=O^-, OH^-, F^-, and applying them in the form of a layer on a dielectric substrate equipped with coplanar measuring electrodes, followed by annealing at temperature of 300 °C for oxidation of MXenes in order to form a surface layer of niobium oxide. Result is the manufacture of a new highly sensitive chemoresistive sensor of organic vapours (when using two measuring electrodes) and a gas analytical multisensor chip (when using more than three electrodes), operating at 300 °C. Sensor is characterized by high sensitivity to organic vapours with a detection limit in the ppb range. Vector signal of the multisensor chip enables to identify pairs of volatile compounds with appropriate processing using artificial intelligence methods.

EFFECT: possibility of making a new chemoresistive sensor of organic vapours or a multisensor chip based on an oxidised layer of two-dimensional niobium carbide Nb₂CT_x (MXene), which enables to analyse the composition of air.

10 cl, 8 dwg