DIFFUSION PUMP Russian patent published in 2022 - IPC F04F9/02 

FIELD: vacuum technology.

SUBSTANCE: invention relates to vacuum technology, namely to a diffusion pump. The pump consists of a vertically mounted housing 1, made in one piece with the bath 11 and fixed in it is the inlet flange 2 and the outlet pipe 3, installed in the lower part of the housing 1 of the multi-stage steam pipeline 4 with umbrella nozzles 5 in the central part along the axis of the housing 1, the funnel 7 , fixed in the lower part of the housing 1, where the steam line 4 is installed, the hole of which, having a smaller diameter, faces the disk 9 for forming a film of the working fluid and serves as the inlet of the steam line 4 and the drain hole of the hydraulic seal 8. In this case, the disk 9 is made monolithic and hermetically fixed on the upper end of the bath 11, on the lower part of which an electric heater 12 is fixed. On the end surface of the disk 9, an annular rim is fixed with a height to form a working fluid film with a thickness equal to, where is the capillary constant.

EFFECT: invention is aimed at increasing the reliability of the diffusion pump and reducing the reverse flow of working fluid vapors through the use of a working fluid film of optimal thickness.

1 cl, 2 dwg