СПОСОБ ЛОКАЛЬНОЙ ЛАЗЕРНО-ИНДУЦИРОВАННОЙ МЕТАЛЛИЗАЦИИ ПОВЕРХНОСТИ ДИЭЛЕКТРИКА Russian patent published in 2023 - IPC C03C17/06 H05K3/18 

FIELD: electrical engineering.

SUBSTANCE: invention relates to the field of electrical engineering, in particular to the technology of local laser-induced deposition of metal structures on a glass surface and can be used to create conductive contacts, microheaters and catalysts in laboratories on a chip, biomolecular sensors and miniature sensors for surface-enhanced Raman spectroscopy. The effect is achieved by the fact that the method for local laser-induced metallization of the dielectric surface includes focusing laser radiation on the substrate-electrolyte interface of a glass substrate immersed in a cuvette with an electrolyte solution. In this case, femtosecond laser radiation is used at a wavelength of 1030 nm, with a pulse duration of 180÷600 fs, pulse energy of 200÷800 nJ, a pulse repetition rate of 200÷500 kHz, the beam of which is passed through a spatial filter with two holes ϕ=130° and θ= 23° and focus using a lens with a numerical aperture of 0.45÷0.65 from bottom to top on the upper surface of the dielectric and move in the plane of the substrate surface at a speed of 0.01÷1 mm/s once or with a number of passes 2-100 with penetration focus under the substrate surface with a step of 1÷5 µm for each subsequent pass. As an electrolyte solution, a 4 M aqueous solution of HAuCl4 is used, and as a dielectric, a glass slide with the composition (wt.%) 72.2 SiO₂, 14.3 Na₂O, 1.2 K2O, 6.4 CaO, 4.3 MgO, 1 .2 Al₂O₃, 0.03 Fe₂O₃, 0.3 SO₃.

EFFECT: formation of gold conductive structures on a glass substrate directly from a metal salt solution.

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