COMBINED TARGET FOR A PLANAR MAGNETRON AND METHOD FOR ITS MANUFACTURE Russian patent published in 2023 - IPC H01J25/00 

FIELD: magnetrons.

SUBSTANCE: invention relates to a combined target for a planar magnetron and a method for its manufacture. The target comprises a rectangular non-combined stainless-steel target configured for creating an erosion zone and subsequent placement of material from the YSZ, Ni-YSZ series in it. The non-combined target is located above the central linear magnet and peripheral magnets, and between the central magnet, peripheral magnets and the lower surface of the non-combined target, a sealed cavity is formed, comprising two holes configured for inlet and outlet of cooling water. In the method for manufacturing the target, the overall dimensions of the magnetron are calculated and modelling is carried out to determine the effective zone and the erosion depth of the planar magnetron and the volume of the erosion zone is calculated, which should be removed from the volume of the non-combined target, said volume is virtually removed to determine the required shape of the combined target. Next, the stainless steel of the non-combined target is removed along the profile of the erosion zone, the volume of steel is selected for the required volume of the erosion zone with the possibility of ensuring the cleanliness of the coating of the erosion zone with material from the YSZ, Ni-YSZ series, poured into the erosion zone, and eliminating erosion of the main target material. Next, the target is placed in an oven to melt the powder.

EFFECT: improved quality of the coating.

2 cl, 1 dwg