PLANAR MAGNETRON WITH UNIFORM TARGET EROSION Russian patent published in 2022 - IPC C23C14/35 

FIELD: planar magnetrons.

SUBSTANCE: invention relates to a planar magnetron with uniform target erosion. Said magnetron contains a housing in which the target and magnets are placed. The case is made of magnetic material. The target is a rectangular target measuring 530 mm x 100 mm and 10 mm thick. The magnets are a central linear magnet, a peripheral magnet and two arc-shaped magnets mounted to the left and right of the central linear magnet. Said rectangular target is located above the central linear and peripheral magnets. Between the central linear and peripheral magnets and the lower surface of said rectangular target, a sealed cavity is formed, made with the possibility of inlet and outlet of cooling water to remove heat generated in the rectangular target.

EFFECT: increased uniformity of target erosion with the possibility of achieving a uniform distribution of the magnetic field.

1 cl, 5 dwg, 1 ex