METHOD FOR GROUP PRODUCTION OF 3-GENERATION ELECTRON-OPTICAL CONVERTERS WITHOUT ION-BARRIER FILM BY TRANSFER METHOD AND DEVICE FOR IMPLEMENTATION THEREOF Russian patent published in 2020 - IPC H01J31/50 H01J9/12 

FIELD: electricity.

SUBSTANCE: invention is related to electronic engineering. Method of electric-to-optical converter (EOC) manufacturing includes periodic loading of groups of assemblies into grouped loading chambers, thermal degassing and cleaning of groups of assemblies in ultrahigh vacuum (UHV) thermal degassing and electronic purification by electronic bombardment, periodic loading of groups of photocathode assemblies (PCA) into gate chambers of loading, preliminary thermal degassing of PCA groups in UHV preliminary degassing PCA unit, group final thermal cleaning of PCA groups in UHV chamber for final cleaning and formation of photocathodes, EOC assembly in UHV assembly chamber, group sealing of assembled EOC in UHV sealing chamber, unloading of finished vacuum units from airlock unloading chamber. Group thermal disassembly of EOC housings with microchannel plate (MCP) is performed at temperature of up to 450÷500 °C and separately group thermal degassing of screen units with porous non-sprayable getter at temperature increased to 450÷550 °C in separate chambers of thermal degassing, performing group ionisation of EOC housings with microchannel plate (MCP) and group ionizing degassing of screen assemblies with porous non-sprayable getter in separate chambers, group double-sided electronic cleaning of EOC housings with MCP and separate group one-sided electronic cleaning of screen units with porous non-dustable gas absorber in separate electronic cleaning chambers using pulse method, which increases output current of MCP to tens of microamperes and increase potential of electron flow during cleaning of screen assemblies with porous non-sprayable gas absorber to 6 and more kilovolts, installing housings with MCP on screen units with formation of screen-hull assemblies, performing group final thermal cleaning of PCA groups in separate final cleaning chamber of PCA, performing group generation of photocathodes, as well as in separate photocathode formation chamber, performing group sealing of EOC on both sides of EOC housing with screen assembly and photocathode assembly at temperature of 50÷70 °C, EOC is supplied from a gated power supply providing pulse voltages not only to the photocathode, but also to the MCP. Disclosed also apparatus for implementing the method.

EFFECT: technical result is higher efficiency of production of EOC of 3^rd generation without ion-barrier film by group method.

2 cl, 5 dwg