VACUUM MICROGYROSCOPE MANUFACTURING METHOD Russian patent published in 2014 - IPC H01L21/48 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measurement equipment, and namely to gyroscopy, and can be used in instrument-making industry, aerospace industry and machine-building industry. Degassing, vacuum treatment and pressurisation is performed in one operational cycle in a tight vacuum chamber with residual pressure of not more than 5·10^-5 mmHg. A base with a magnetic system and a silicon resonator and a cover plate is arranged separately in a tight vacuum chamber without any contact to each other, and at the same time, they are degassed at the temperature of at least 150°C during at least 4 hours, and for the purpose of vacuum treatment and pressurisation the base is closed with the cover plate and pressurised; at the same time, vacuum treatment of a gyroscope is provided, thus supporting residual pressure inside the pressure-tight vacuum chamber of not more than 5·10^-5 mmHg.

EFFECT: improving quality and providing manufacturability.

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