FIELD: instruments, laser interference measurements. SUBSTANCE: device may be used for monitoring the position of borders of articles (objects) in order to measure article size, perform standard calibration, measure wear of cutters of tools. Method uses non- linearity or phase characteristics (bell shape) of Δϕ/Δl as single maximal value within working range. This non-linearity provides possibility to detect the position of article border. Joint use of two displaced phase characteristics ϕ(1) and ϕ(2), which maximal values are l1 and l2, using two photodetectors, provides possibility to generate two borders. Thus, tolerance field for monitoring region can be provided for measuring borders of article. EFFECT: increased functional capabilities. 5 cl, 2 dwg
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Authors
Dates
2000-10-20—Published
1999-03-01—Filed