REACTOR FOR PARTICLE COATING IN FLUIDIZED BED USING CHEMICAL VAPOR DEPOSITION Russian patent published in 2023 - IPC C23C16/54 C23C16/442 

FIELD: chemical vapor deposition.

SUBSTANCE: invention is related to a vacuum conical reactor for chemical vapor deposition of a coating onto powder in a fluidized bed with separate input of fluidizing gas and reagent. Said reactor contains a lid, a lower fluidizing gas input pipe configured to discharge the coated powder, a nozzle having a water jacket and passing through the reactor lid, an upper pipe for pumping out and providing flow mode in it, and a gas outlet pipe. The specified conical reactor is made with an upward opening angle of 25-40° and with the possibility of heating by an external resistive electric furnace. The nozzle is configured to be connected to an evaporator having a water jacket and providing evaporation of the reagent, or to be connected to a cylinder with said reagent. The nozzle is designed to introduce the reagent from above with respect to the upper boundary of the fluidized layer of powder particles, ensuring during the process of chemical vapor deposition a total pressure above the said layer of 1-10³ Pa.

EFFECT: ensures a significant reduction in labor costs and time for cleaning the internal walls of the reactor elements from dense and loose reaction products.

2 cl, 1 dwg, 3 ex