FIELD: X-ray examination of a sample.
SUBSTANCE: essence of the invention lies in the fact that the radiation of a high-frequency femtosecond laser system is sharply focused on the surface of a target mounted on a positioner, which provides a change in the spatial position of the target in six directions, while ensuring optimization of the target position relative to the lens focus by compensating for the non-ideal position of the target working plane relative to the normal plane fall of the laser beam, as well as the linear trend arising due to grinding of the target surface during laser ablation, for which an optical image of the laser radiation focusing area, from which the second harmonic component generated on the laser-induced microplasma using a digital camera and spectrometer is isolated, is sent to the control computer, which sends a signal generated using a neural network.
EFFECT: increasing image contrast and spatial resolution when examining samples.
3 cl, 4 dwg
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Authors
Dates
2024-01-22—Published
2023-08-29—Filed