METHOD FOR FORMING DEFECTS IN VOLUME OF DIELECTRIC SAMPLE WITH LASER RADIATION Russian patent published in 2018 - IPC B23K26/02 

Abstract RU 2671150 C1

FIELD: technological processes.

SUBSTANCE: invention relates to the field of laser processing of materials and concerns the method of forming defects in the volume and on the surface of a dielectric. Method includes the generation of femtosecond laser pulses in the short-wave and long-wave ranges, determination of threshold energies for each radiation, reduction of two focused pulses, determination of the time delay of the long-wave pulse, the effect on the sample of laser pulses with the parameters found, control of the process of creating defects. Reduction of the two focused pulses in the first stage is performed by visualizing the photoluminescence regions of the plasma from both pulses, and the time delay between the pulses is determined from the minimum value of the nonlinear transmission of the long-wave pulse. At the second stage, the reduction is carried out by recording the maximum signal of the third harmonic from the long-wave pulse. Parameters of the defects are monitored by recording the signal of an unsynchronized third harmonic from the long-wave pulse generated on the defects formed.

EFFECT: technical result consists in increasing the accuracy of the radiation guidance, reducing the energy of the pulses and providing the possibility of monitoring the processes in real time.

12 cl, 8 dwg, 1 tbl

Similar patents RU2671150C1

Title Year Author Number
PROGRAMMABLE POLARITON SIMULATOR 2020
  • Pavlos Lagoudakis
  • Sergey Yurievich Alyatkin
  • Alexis Askitopoulos
RU2745206C1
FEMTOSECOND OPTOELECTRONIC SYSTEM FOR MEASURING THE FIELD OF THZ PULSES OBTAINED USING AN ELECTRON ACCELERATOR 2018
  • Esaulkov Mikhail Nikolaevich
  • Konyashchenko Aleksandr Viktorovich
  • Kuritsyn Ilya Igorevich
  • Mavritskij Aleksej Olegovich
  • Tausenev Anton Vladimirovich
RU2697879C1
METHOD FOR SPACE-SELECTIVE CRYSTALLISATION OF GLASS 2015
  • Lipateva Tatyana Olegovna
  • Lipatev Aleksej Sergeevich
  • Larkin Aleksej Stanislavovich
  • Lotarev Sergej Viktorovich
  • Okhrimchuk Andrej Gordeevich
  • Sigaev Vladimir Nikolaevich
RU2616958C1
METHOD OF CONTROLLING SURFACE ROUGHNESS BASED ON REFLECTED GIGANTIC SECOND HARMONIC GENERATION EFFECT 2009
  • Batsev Sergej Vladimirovich
  • Davletshin Il'Dar Zagitovich
  • Samutina Elena Pavlovna
  • Ulasevich Mikhail Stepanovich
RU2421688C2
MATERIAL PROCESSING DEVICE AND METHOD FOR OPERATION OF THIS DEVICE 2009
  • Vojttennek Frantsiska
  • Vel'Fel' Matias
  • Fogler Klaus
  • Kittel'Mann Olaf
RU2522965C2
METHOD OF CONTROLLING STRUCTURAL QUALITY OF THIN FILMS FOR LIGHT-ABSORBING SOLAR CELL LAYERS AND DEVICE FOR ITS IMPLEMENTATION 2016
  • Pavlovskij Vyacheslav Nikolaevich
  • Svitenkov Ilya Evgenevich
  • Lutsenko Evgenij Viktorovich
  • Yablonskij Gennadij Petrovich
  • Mudryj Aleksandr Viktorovich
  • Zhivulko Vadim Dmitrievich
  • Borodavchenko Olga Nikolaevna
  • Yakushev Mikhail Vasilevich
RU2631237C2
METHOD FOR CUTTING OF TRANSPARENT NON-METAL MATERIALS 2002
  • Alekseev A.M.
  • Kryzhanovskij V.I.
  • Khait O.V.
RU2226183C2
PROCESS OF MEASUREMENT AND TESTING OF PARAMETERS OF LAYERS OF MICROCIRCUITS 1991
  • Aktsipetrov Oleg Andreevich
  • Grishachev Vladimir Vasil'Evich
  • Denisov Viktor Ivanovich
RU2006985C1
LASER SCRIBING METHOD FOR SEMICONDUCTOR WORKPIECE USING SEPARATED LASER RAYS 2015
  • Vanagas, Egidijus
  • Kimbaras, Dziugas
  • Veselis, Laurynas
RU2677574C1
METHOD FOR NANOPATTERNING SURFACE OF DIELECTRIC SUBSTRATE USING NEAR-FIELD LITHOGRAPHY 2014
  • Bitjurin Nikita Mikhajlovich
  • Afanas'Ev Andrej Vladimirovich
  • Pikulin Aleksandr Viktorovich
RU2557677C1

RU 2 671 150 C1

Authors

Potemkin Fedor Viktorovich

Mareev Evgenij Igorevich

Bezsudnova Yuliya Igorevna

Dates

2018-10-29Published

2017-08-31Filed