MICROFOCUS X-RAY SOURCE Russian patent published in 2023 - IPC H01J35/02 G01N23/04 

FIELD: X-ray microscopy.

SUBSTANCE: invention can be used to create a projection X-ray microscope for non-destructive testing and diagnostics of structures and processes with high resolution. In a microfocus X-ray source containing a femtosecond laser, a mirror, a lens mounted on a positioner equipped with a motor, a target and a radiation detector, a dielectric mirror is installed along the laser beam, which reflects the infrared radiation of the laser towards the target and transmits visible radiation towards the digital camera, behind the mirror in the direction of infrared radiation, there is a lens equipped with a nozzle for blowing gas, behind which, in the direction of infrared radiation, a disk-shaped target is placed on the positioner. The target faces the radiation with its side surface and performs rotational and reciprocating motion in the direction of the rotation axis. The laser, digital camera, X-ray detector and positioner motor are connected to the control computer.

EFFECT: enabling the creation of a projection X-ray microscope for non-destructive testing and diagnostics of structures and processes with high resolution.

5 cl, 3 dwg