METHOD OF CHECKING OR ADJUSTING TESTER OF VERY LARGE INTEGRATED CIRCUITS, MANIPULATOR AND BOARD FOR IMPLEMENTING METHOD Russian patent published in 2024 - IPC G01R31/28 

FIELD: measuring equipment.

SUBSTANCE: invention relates to positioning of measuring equipment, in particular a calibration robot. Essence: a method of checking or adjusting a tester of very large integrated circuits, characterized by the fact that it uses an adapter board and a detachable manipulator. Board is installed on the tester so that the connecting elements of the board come into electrical contact with the corresponding outputs of the tester. Detachable manipulator with probe is installed so that its carriage can move in the whole plane of adapter board. Manipulator carriage is moved to mark reading position, made with possibility of obtaining information on its coordinates on adapter board and suitable for reading by camera installed on manipulator carriage. Coordinate system of the control unit is corrected taking into account the coordinates of the mark and the manipulator carriage is moved in the plane of the board taking into account the corrected coordinates.

EFFECT: faster verification/adjustment of the tester, reduced number of mechanical actions of the operator during verification/adjustment.

5 cl, 8 dwg