METHOD FOR MANUFACTURING SUPERCONDUCTING QUBITS WITH FOCUSED ION BEAM ANNEALING Russian patent published in 2024 - IPC H10N60/01 H10N60/12 

FIELD; superconductors.

SUBSTANCE: manufacturing qubits and superconducting devices for quantum computers, namely systems based on thin-film Josephson junctions, used to fine-tune the resonant frequency of superconducting qubits containing thin-film Josephson junctions after their manufacture, for example, qubits, tunable or fixed by frequency, as well as cryogenic Josephson parametric amplifiers. The method for manufacturing superconducting qubits with annealing by a focused ion beam, including the production of thin-film aluminium/aluminium oxide/aluminium Josephson junctions 2 on a substrate 8 connected to two capacitor plates 3, processing of superconducting qubits 1 by annealing thin-film aluminium/aluminium oxide/aluminium Josephson junctions 2, annealing of superconducting qubits 1 is carried out with a Gaussian focused ion beam 13 through local changes in the properties of thin-film aluminium/aluminium oxide/aluminium Josephson junctions 2.

EFFECT: increasing the reproducibility of adjusting the resonant frequency of superconducting qubits of any type, reducing the labour intensity and cost of the production route for manufacturing superconducting qubits and superconducting devices for quantum computers.

13 cl, 4 dwg