STRAIN-MEASURING PRESSURE CONVERTER Russian patent published in 1995 - IPC

FIELD: measurement technology. SUBSTANCE: converter is silicon monocrystal 1 with membrane 2 formed in it by method of anisotropic etching. In peripheral regions of membrane 2 there are located resistance strain gauges R₁-R₄ formed by successive connection of resistive strips 3 and 4 placed inside region limited by curve of equal relative changes of resistances. Under action of pressure deformations taken up by resistance strain gauges R -R₄ connected in bridge circuit emerge in membrane 2. EFFECT: enhanced sensitivity of converter. 3 dwg