INTEGRAL ACCELERATION TENSOTRANSDUCER Russian patent published in 2014 - IPC H01L29/84 

FIELD: measurement equipment.

SUBSTANCE: integral acceleration tensotransducer comprises two bases made of solid monocrystall and a mechanical stress concentrator connecting them with their working surfaces being located in the same crystallographic plane (100). The working surface of the concentrator is equipped with resistance strain gages connected as a bridge joint and oriented to crystallographic directions [110]. One of the bases is made as a monocrystall frame with the second base, made as inertia mass, being placed inside. The resistance strain gages are produced from polycrystalline silicon on a dielectric layer which is located on the working side of the mechanical stress concentrator, inertia mass and contact pad zone on the monocrystall frame. The contact pad zone on the monocrystall frame is fitted by a thermistor from polycrystalline silicon on a dielectric layer.

EFFECT: increased temperature range for tensotransducer operation due to the reduction of temperature error of acceleration measurement, enhanced functionality due to simultaneous measurement of acceleration and temperature.

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