METHOD FOR MANUFACTURING CAPACITIVE MATRIX PRESSURE SENSORS Russian patent published in 1994 - IPC

Abstract SU 1526373 A1

FIELD: measurement technology. SUBSTANCE: 4.4-diaminodiphenyl resorcinol ester and 3.3,4.4-diphenyloxidetetracarbonic acid dianhydride base polyamide acid varnish is applied to base to form dielectric layer. Each dielectric layer of mentioned varnish is subjected to heat treatment at 80 to 100 deg. C for 5 to 20 minutes, then at 120 to 140 deg. C for 5 to 10 minutes, at 160 to 200 deg. C for 5 to 10 minutes, at 220 to 240 deg. C for to 10 minutes, and at 280 to 320 deg. C for 5 to 15 minutes. EFFECT: improved sensitivity and reliability in operation. 4 dwg

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SU 1 526 373 A1

Authors

Kazarjan A.A.

Blinov V.F.

Gerashchenko Z.V.

Dates

1994-01-30—Published

1987-11-04—Filed