CAPACITIVE PRESSURE SENSOR AND METHOD OF ITS MANUFACTURE Russian patent published in 1997 - IPC

Abstract RU 2099681 C1

FIELD: measurement technology. SUBSTANCE: sensor has five metallized and nonmetallized films. Sensing elements, films 4, 12 with sensor capacitor plates are protected against edge effects and external electromagnetic fields. In this case, sizes of capacitor plates 6, 16 are selected to be larger than those of plates 9, 14 to protect them against edge effects. Two sensing elements are insulated from each other by aluminium oxide film 11. All polyimide films 1, 4, 12 are interconnected by epoxy-rubber-based film. Assembled pack is kept under press at pressure of 30-35 kg/sq.cm and temperature of 165-175 C for 50-60 min and then cooled to 50-60 C. EFFECT: higher measurement results. 2 cl, 1 dwg

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RU 2 099 681 C1

Authors

Kazarjan A.A.

Dates

1997-12-20Published

1996-02-01Filed