FIELD: measurement technology. SUBSTANCE: sensor has five metallized and nonmetallized films. Sensing elements, films 4, 12 with sensor capacitor plates are protected against edge effects and external electromagnetic fields. In this case, sizes of capacitor plates 6, 16 are selected to be larger than those of plates 9, 14 to protect them against edge effects. Two sensing elements are insulated from each other by aluminium oxide film 11. All polyimide films 1, 4, 12 are interconnected by epoxy-rubber-based film. Assembled pack is kept under press at pressure of 30-35 kg/sq.cm and temperature of 165-175 C for 50-60 min and then cooled to 50-60 C. EFFECT: higher measurement results. 2 cl, 1 dwg
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Authors
Dates
1997-12-20—Published
1996-02-01—Filed