CAPACITIVE PRESSURE SENSOR AND METHOD OF ITS MANUFACTURE Russian patent published in 1997 - IPC

FIELD: aviation engineering; aerodynamic. SUBSTANCE: sensor construction is developed on basis of three dielectric polyimide films (1, 4, 8). Sensor construction enable its connection to electric circuit of the differential connection type. In this case, signal at sensor output with measuring equipment is not affected by external electromagnetic interferences. Aluminium oxide is used as insulation films 3, 14 between current-carrying parts of sensor. Sensor is manufactured on the basis of metallized dielectric polyimide films and polyamide acid lacquer. The latter is transformed to final product-polyimide (films 8 and 1) by thermal treatment under the following conditions: at temperature of 80-100 C of 5-20 min duration, at temperature of 180-220 C of 5-20 min duration, and at temperature of 280-320 C of 5-15 min duration. EFFECT: higher interference suppression. 2 cl, 1 dwg