FIELD: mechanical engineering. SUBSTANCE: sequent piercing is performed by focused pulsed laser radiation. This operation is carried out by changing energy and spatial shape of distribution of laser radiation within each pulse train. Radiation wavelength is changed within limits of each pulse train. Laser radiation with wavelength 10,6 microns is used for piercing holes in dielectric, when piercing holes in copper wavelength 1,06 microns is used. Modulator of the device used for that treatment is made of three sectors, moreover, the first one is made in form of continuous slit cut in the bottom of a cylinder. Position detector is disposed between the second and the third sectors. EFFECT: improved quality of walls of the holes. 2 cl, 2 dwg
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