FIELD: ohysics. SUBSTANCE: invention refers to gaseous-discharge sources of ions. accelerating electrode 2 is manufactured in the form of grids 3 and 4. Ions fromplasma emitter 1 pass through grids and hit collector 5 of ions. Secondary electrons are reflected from collector by grid 4. Current of secondary electrons from grids 3 and 4 is small because of high transparency of grids. EFFECT: increased density of ion current and homogeneity of ion beam. 1 dwg
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Authors
Dates
1995-11-27—Published
1988-06-15—Filed