PLASMA ION EMITTER Russian patent published in 1998 - IPC

FIELD: vacuum-plasma engineering, sources of large- section ion beams and/or fast neutral molecules of inert and chemically active gases. SUBSTANCE: plasma ion emitter has emitting mesh, hollow cathode open on side facing the mesh, anode, and discharge supply. Negative pole of discharge supply is connected to hollow cathode and positive pole, to anode. At least two symmetrically arranged holes are provided on side surface of hollow cathode in vicinity of emitting mesh. Anode is made of set of isolated electrodes placed outside hollow cathode near holes. Their number is same as that of holes; sectional area S_N of each hole meets condition S_N < (2m/M)^1/2S/N, where S is total area of hollow cathode and emitting mesh inner surface; m and M is, respectively, mass of electron and ion of working gas. Positive pole of discharge supply may be connected to anode electrodes via separate resistors. EFFECT: improved design. 2 cl, 3 dwg