FIELD: tool-making industry, in particular, engineering of systems for measuring movement parameters of moving objects, possible use in devices, measuring acceleration of objects.
SUBSTANCE: accelerometer contains two accelerometer elements, consisting of their seismic mass, suspension and system for exciting oscillations and recording information. also, seismic mass is connected to vibrating bar. Seismic mass, vibrating bar, suspension and connecting elements are made on one piece of material, for example, quartz. Resilient bar and connecting element are positioned in parallel planes. Current-conductive track of excitation and information recording system is applied by means of, for example, sputtering, onto aforementioned bar. Sensitivity axis is perpendicular to bar plane, while suspension axis is perpendicular to plane, passing through sensitivity axis and axis of bar.
EFFECT: increased sensitivity and stability with simultaneous decrease of dimensions and increased manufacturability.
2 dwg
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