MICROMECHANICAL VIBRATION GYROSCOPE-ACCELEROMETER Russian patent published in 2001 - IPC

FIELD: measurement technology, instrumentation. SUBSTANCE: invention can find use in inertial systems of mobile objects, in automatic pilots of aircraft and ship models, in safety systems of vehicles. Gyroscope-accelerometer has plate of dielectric material with electrodes of angle-data transmitter and slaving-torque motor deposited on it and inertial mass put in spaced relation to plate and coupled to it via spring beams which are made fast with one ends to supports placed on plate and with other ends to inertial mass. Inertial mass is manufactured in the form of plate of current-conducting material with through holes and side comb teeth of electrodes of plate. Plate carries electrode of excitation system with comb teeth. Electrodes are connected to signal processing electron circuit. At least two through parallel grooves are cut in plate from its periphery to line of its geometric center. Ends of spring beams are mounted in grooves in points of their crossing with line for vibration in plane of plate and orthogonally to it. EFFECT: miniaturization of structural circuit with simultaneous expansion of functional capabilities thanks to measurement of angular velocity and linear acceleration. 4 cl, 4 dwg