SENSITIVE ELEMENT OF A MICROELECTROMECHANICAL ANGULAR SPEED SENSOR Russian patent published in 2019 - IPC G01C19/56 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of measuring equipment and microsystem equipment, namely to integral angular velocity measuring elements. Essence of the invention lies in the fact that the sensitive element of the microelectromechanical angular velocity sensor contains a base, a comb excitation and vibration measurement system, an inertial mass made in the form of a board with a through hole, located with a gap relative to the base and connected to it through a system of elastic suspensions, while the through hole is made in the center of the inertial mass, inside the through hole there is a system of elastic suspensions and comb excitation and vibration measurement systems, movable electrodes of which are mounted on suspensions, some of which are fixed on the base, and others on the inertial mass.

EFFECT: improving the accuracy of measuring the angular velocity, reducing the overall mass characteristics.

1 cl, 1 dwg