METHOD OF CONTROLLING HERMETICITY OF OBJECTS Russian patent published in 2008 - IPC G01M3/02 

FIELD: physics.

SUBSTANCE: present invention pertains to testing technology and can be used for examining hermeticity of objects, working under excess pressure in a vacuum. The object is put into a vacuum chamber and evacuated. A standard stream of a control gas is let into the vacuum chamber. The change in readings of the leakage detector is measured. The reference stream is cut off. The object is filled with the control gas again. The change in the readings of the leakage detector are measured, from which it hermeticity of the object can be determined. After connecting the vacuum chamber to mass-spectrometer chamber of the leakage detector, the latter is evacuated. Before supplying the standard stream of the control gas into the vacuum chamber, another stream of control gas is also let in, the value of which corresponds to the required control sensitivity. A thoriated nitrogen stream is directly let into the mass-spectrometer chamber, taking the readings of the leakage detector at the same time. Pressure in the mass-spectrometer chamber is measured. Supply of the additional stream of control gas is cut off. Constant pressure is maintained in the mass-spectrometer chamber.

EFFECT: increased sensitivity and faster control process.

1 dwg