PROCESS TESTING TIGHTNESS OF ARTICLE Russian patent published in 1997 - IPC

FIELD: testing equipment. SUBSTANCE: chamber with article is pumped out. Additional volume communicated with vacuum chamber and connected to leak detector is pumped out with different productivity by evacuated gases. In this case total pumping-out capacity is chosen from necessity of creation of full pressure in additional volume corresponding to minimal full pressure of working pressure range in chamber of mass spectrometer of leak detector. Gas pumping out capacity is chosen from necessity of formation in additional volume of partial pressure of testing gas not exceeding maximum partial pressure registered by leak detector. Calibrated flow of testing gas is fed into chamber and readings are taken from calibrated flow of testing gas by leak detector. Changing flow of analyzed gas from chamber to additional volume till it reaches specified working range of leak detector by registration of partial pressure of tasting gas one feeds flow of neutral gas into additional volume. Its value is changed to obtain full pressure corresponding to maximum reading of leek detector from calibrated flow of testing gas. Article is filled with testing gas and readings from article are measured by leak detector. Lack of tightness of article is determined by analysis of gas from chamber, by relation of measured readings from article and calibrated flow. EFFECT: enhanced sensitivity of test, reduced labour input when testing for tightness.