POLISHING ETCHING AGENT FOR TREATMENT OF CRYSTALS OF DIPHTHORIDE OF BARIUM Russian patent published in 1994 - IPC

Abstract RU 2006981 C1

FIELD: microelectronics. SUBSTANCE: polishing etching agent for treatment of crystals of diphthoride of barium contains hydrobromide acid 10-50 volume per cent and glycerine 50-90 volume per cent. EFFECT: improved quality of crystals.

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RU 2 006 981 C1

Authors

Vasil'Eva L.F.

Vinichuk S.G.

Sveshnikova L.L.

Dates

1994-01-30—Published

1992-03-19—Filed