FIELD: electrochemical methods of checking semiconductor materials. SUBSTANCE: plate under check is used as working electrode of electrochemical cell. The latter has, apart from working electrode, comparing electrode and auxiliary electrode. It also accommodates additional electrode made of material under check for deposition of impurities. EFFECT: facilitated procedure. 2 dwg
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Authors
Dates
1994-02-28—Published
1991-03-28—Filed