PRESSURE TRANSDUCER Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: pressure transducer has vacuum-treated body, membrane with elastic center fabricated integral with cylindrical bearing base with formation of peripheral cantilever section, disc installed with clearance with respect to membrane with the aid of spacers located over periphery of cantilever section and capacitive deformation converter built in the form of two pairs of opposed electrodes placed in center and over undeformed part of membrane. Pressure transducer is supplemented with additional bushing made fast with opposite faces to bearing base and cantilever section. Coefficient of linear expansion of material of bushing is not equal to that of material of bearing base and membrane and elements of structure are manufactured in accordance with relations specified in description of invention. EFFECT: reduced temperature error thanks to compensation for thermal changes of geometrical dimensions, elements of structure and change of modulus of elasticity of membrane with change of temperature. 1 dwg