CAPACITIVE PRESSURE TRANSDUCER AND PROCESS OF ITS MANUFACTURE Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: capacitive pressure transducer has body, restoring element in the form of membrane with elastic center, dielectric backing put on surface of restoring element. On dielectric backing there are formed electrodes connected to contact pads contacting output conductors. Restoring element carries plate with interelectrode gap and second dielectric backing located on its face. Electrodes are formed on dielectric backing connected to contact pads contacting output conductors. Dielectric backings are manufactured in the form of flexible foiled dielectric films made fast with unfoiled side to restoring element and plate. Contact pads of electrodes are arranged on backings fastened to face placed in opposition to face with electrodes and on side surface of protrusion made in central part of plate and are uniformly divided with the aid of radial current-carrying partitions fabricated integral with plate and protrusion. Output conductors are made in the form of shielded conductors which shields are electrically and mechanically connected to protrusion and body. Process of manufacture includes fabrication of restoring element and plate, formation of electrodes with contact pads on foiled side of flexible dielectric film, its separation into separate backings with electrodes and contact pads, application of bonding material to contacting surfaces of backings of restoring element and plate, pressing of backing to restoring element and plate. Pressing in areas of arrangement of electrodes is executed with the help of manufacturing plates with flat polished surfaces till process of polymerization of bonding material ends. Plate is anchored on restoring element with clearance. Shields of output conductors are attached to protrusion of plate and output conductors are connected to contact pads of electrodes and shields of output conductors are linked to body of pressure transducer. EFFECT: facilitated manufacture, increased sensitivity and expanded field of application. 2 cl, 4 dwg