CAPACITIVE PRESSURE TRANSDUCER AND DEVICE TO FORM ITS OUTPUT SIGNAL Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: capacitive pressure transducer has main membrane with bearing base, electrodes located in central part of membrane and on its bearing base, supplementary membrane with elastic center and bearing base and electrodes, output conductors partially placed into interelectrode gap. Peripheral electrode of supplementary membrane is put on its elastic center. Pressure block is manufactured in the form of plate. Supplementary membrane is hermetically joined to pressure block with the aid of bushing. Dielectric film located on planar surfaces of membranes is used for insulation of electrodes. Sealed coupling of supplementary membrane with main one is accomplished through pressure block and ring. Device to form output signal of capacitive pressure transducer has first and second amplifiers, reference capacitors connected to input of first amplifier through first commutation key and instrument capacitor placed into feedback circuit of first amplifier. Reference and instrument capacitors are by turns connected into feedback circuit through second commutation key. Output of first amplifier is by turns connected through third key in step with first commutation key to non-inverting and inverting inputs of second amplifier which output is linked to integrator. EFFECT: expanded operational capabilities, increased reliability. 2 cl, 2 dwg