CAPACITIVE PRESSURE TRANSDUCER AND METHOD OF ITS MANUFACTURE Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: capacitive pressure transducer has first membrane with elastic center and peripheral base made fast to elastic center and peripheral base of second membrane, plate placed with clearance with reference to second membrane, electrodes of instrument and reference capacitors and output conductors located in interelectrode gaps and contacting output electrodes of capacitors. Second membrane has through slots forming identical straps placed uniformly connecting elastic center and peripheral base of membrane. Through grooves forming identical straps are made in peripheral bases of membranes. Pressure transducer can be supplemented with additional membrane in which central part rod in the form of hollow bushing with longitudinal slots forming protrusions located in slots of plate and second restoring member is anchored and made fast to side surface of elastic center. Characteristic feature of manufacturing method lies in making of through slots in second membrane before polishing restoring members and plate. Grooves in bases of membranes rigidly join bases by means of welding. First restoring member is placed with planar side on technological surface. Elastic centers are pressed to each other and are joined with welding. Then plate and planar side of second membrane are polished, electrodes of capacitors are formed on them. Output conductors are arranged on output electrodes of capacitors, plates are pressed ands attached to base of second membrane. EFFECT: enhanced sensitivity and expanded field of application of capacitive pressure transducer. 4 cl, 4 dwg