CAPACITIVE PRESSURE TRANSDUCER AND DEVICE FORMING ITS OUTPUT SIGNAL Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: capacitive pressure transducer has main restoring element in the form of membrane, electrodes located in central part of main restoring element and on its bearing base, supplementary similar restoring element with electrodes, conductors partially placed in interelectrode gap. Peripheral electrode of supplementary restoring element is positioned on its membrane. Elastic center of supplementary restoring element is rigidly and non-hermetically coupled to bearing base. Supplementary restoring element is hermetically connected to sealed block with the aid of first bushing. Hermetic connection of supplementary restoring element with main one is accomplished via sealed block and second bushing. Device forming output signal of capacitive pressure transducer has first and second amplifiers, reference capacitor connected across input of first amplifier and instrument capacitor placed into feedback circuit of first amplifier. Reference and instrument capacitors are by turns placed into feedback circuit through first commutation key. Output of first amplifier is by turns connected through key in step with first key to non-inverting and inverting outputs of amplifier which output is connected to integrator through detector. EFFECT: expanded capability for measurement of positive pressure or pressure difference. 4 cl, 2 dwg