FIELD: radio measurement technology. SUBSTANCE: method for checking thickness and dielectric constant of dielectric involves simultaneous irradiation of metal-base dielectric under check in microwave and RF ranges, RF radiation frequency being selected proceeding from condition that thickness of circuit-layer is smaller than that of metal base, check-up of variations in signals detected at RF and microwave frequency in the absence of metal-base dielectric and in its presence, and determination of thickness and dielectric constant from measured values using calculated relationships. EFFECT: enlarged range of measured values. 1 dwg
Authors
Dates
1994-05-15—Published
1989-07-20—Filed