FIELD: electronic engineering. SUBSTANCE: apparatus for plasma spraying of film covers has magnetron sprayer with cathode-target, anode, base holder, magnetic system and steady level voltage source. Variable capacity capacitor is inserted between cathode-target and anode and magnetic system meets the following term - 0,05≅ B≅ 0,07 with B - value of magnetic induction. EFFECT: apparatus increases efficiency of target use due to metal target spraying in vacuum. 1 dwg, 1 tbl
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Authors
Dates
1994-09-15—Published
1992-07-07—Filed