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2 014 671

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C1

(51)

IPC

(21) (22)

Application

4938534/25, 1991-05-24

(22)

Actual filing date

1991-05-24

(45)

Published

1994-06-15

(72)

Inventor

Bulgakov A.G.Kirienko V.G.Sanin K.V.

(73)

Holder

Tsentral'Nyj Nauchno-Issledovatel'Skij Institut

PROCESS OF MANUFACTURE OF CHARGE-COUPLED DEVICES Russian patent published in 1994 - IPC

Abstract RU 2014671 C1

FIELD: microelectronics. SUBSTANCE: invention can find use in manufacture of MIS microcircuits. Process involves formation of masking layer on silicon substrate, preliminary heat treatment, formation of elements of device and finishing heat treatment. Cooling after heat treatment is conducted in accordance with preset program. EFFECT: facilitated manufacture.

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RU 2 014 671 C1

Authors

Bulgakov A.G.

Kirienko V.G.

Sanin K.V.

Dates

1994-06-15—Published

1991-05-24—Filed

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