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2 015 954

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IPC

(21) (22)

Application

5003246/04, 1991-07-08

(22)

Actual filing date

1991-07-08

(45)

Published

1994-07-15

(72)

Inventor

Vlasov G.A.Frolov K.I.Buravtseva G.I.Ponomareva O.Ja.Shumkova T.A.

(73)

Holder

Vlasov Gennadij Afanas'EvichBuravtseva Gul'Nur IsmagilovnaPonomareva Ol'Ga Janovna

PROCESS FOR PURIFYING FLUOROCHLOROCARBON FLUIDS Russian patent published in 1994 - IPC

Abstract RU 2015954 C1

FIELD: microelectronics. SUBSTANCE: purification is carried out by neutralization of a free acidity with an alkaline metal hydroxide followed by separation of the slurry. A fluorochlorocarbon fluid preneutralized and separated from the slurry in treated with a coagulant in two stages at 70-120 C under rarefaction in the first stage and at 190-250 C under atmospheric pressure in the second stage. EFFECT: improved purification process. 1 tbl

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RU 2 015 954 C1

Authors

Vlasov G.A.

Frolov K.I.

Buravtseva G.I.

Ponomareva O.Ja.

Shumkova T.A.

Dates

1994-07-15—Published

1991-07-08—Filed