METHOD OF PRODUCING FLUORINE-CONTAINED MIXTURE OF CLOSED CYCLE EXCIMER LASERS Russian patent published in 1994 - IPC

Abstract RU 2022432 C1

FIELD: laser engineering. SUBSTANCE: fluorine is supplied in doses into discharge chamber due to electrolyzing aqueous solution of alkali metal fluorides, when fluorine is measured through membrane of solid electrolyte. Positive potential is applied to output surface of the membrane. Used mixture is regenerated due to passing the mixture through electrolytic cell along the surface of the membrane made of solid electrolyte, to which negative potential is applied. Mixture is fed with fluorine due to electrolyzing aqueous solution of alkali metal fluorides accompanied with fluorine metering. EFFECT: improved efficiency. 2 dwg

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RU 2 022 432 C1

Authors

Zverev A.G.

Chumak G.M.

Bogoljubov V.B.

Smirnov A.N.

Glumov O.V.

Dates

1994-10-30Published

1992-08-07Filed