THIN-FILM PRESSURE TRANSDUCER Russian patent published in 1995 - IPC

FIELD: measurement technology. SUBSTANCE: additional film of the pressure transducer has heat conductivity coefficient being lower than that one of the membrane. The film is located at the surface of the membrane at the side of resistance strain gauges 6. Through windows are made in film 7 at the area of support base. Dielectric 5 has heat conductivity coefficient being higher than that one of the membrane; the dielectric is disposed partially at through windows of the film. Additional dielectric layer 9 may be placed onto the surface dielectric 5 and resistance strain gauges 6. The layer has heat conductivity coefficient being equal to that one of basic dielectric. EFFECT: improved corrosion strength; improved stability of metrological parameters. 2 cl, 6 dwg