FIELD: measurement technology. SUBSTANCE: to increase accuracy of measurements pressure transducer is provided with housing 1, flexible member 2 in form of rigidly clamped diaphragm with dielectric 3 and tensoresistors on one side and heat insulating film 7 on other side. The latter is made with different thickness calculated by corresponding formula. EFFECT: enhanced reliability, increased accuracy of measurement. 3 dwg
Title | Year | Author | Number |
---|---|---|---|
PRESSURE GAUGE | 1985 |
|
RU2026537C1 |
METHOD OF MANUFACTURE OF PRESSURE TRANSDUCER | 1987 |
|
RU2028586C1 |
PRESSURE GAUGE | 1987 |
|
RU2034252C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2028588C1 |
PRESSURE TRANSDUCER | 1984 |
|
RU2028583C1 |
PRESSURE TRANSDUCER | 1984 |
|
RU2024829C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2041452C1 |
THIN-FILM PRESSURE GAUGE | 1988 |
|
RU2034253C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2028587C1 |
METHOD OF TUNING THIN-FILM PRESSURE TRANSDUCER | 1985 |
|
RU2028584C1 |
Authors
Dates
1995-02-09—Published
1986-12-31—Filed