THIN-FILM PRESSURE TRANSDUCER Russian patent published in 1995 - IPC

FIELD: measurement technology. SUBSTANCE: strain-gauge pressure transducer has flexible member 2, metal membrane covered with dielectric layer 3 and resistance strain gauges disposed onto the layer. Surface of the membrane at the side of dielectric 3 is made in form of permanent microrelief with embossed members. The members may be made in form of similar hexagons. Parameters of the hexagons are determined from specific relation which takes into account specific disposition of resistance strain gauges. EFFECT: improved precision of measurement. 2 cl, 5 dwg