CLOSED-ELECTRON-DRIFT ION SOURCE Russian patent published in 1995 - IPC

FIELD: vacuum coating of surfaces. SUBSTANCE: emission slit of ion source with closed electron drift is formed in permeable case that functions as cathode by two parallel straight sections closed at ends by curvilinear sections of slit. Slit length L and width Δ are selected considering condition L/Δ>3. Anode is spaced at n=(0,2-0,4)Δ distance from nearest surface of magnetic circuit pole shoe. Anode may have rectangular or wedge-shaped space arranged symmetrically opposite to emission slit. Opposing pole shoes with permeable case members may be electrically isolated and grounded through current recording instruments. EFFECT: reduced dissipation of pole shoes and, hence, improved purity of coatings of treated surfaces. 5 cl, 5 dwg