ION SOURCE ( VARIANTS ) Russian patent published in 2002 - IPC

FIELD: plasma technology. SUBSTANCE: invention is related to gears designed to generate intensive ion beams which can be used in ion-beam technology. Face wall of case of ion source in which closed outlet is made is manufactured of magnetoconductive material. Parts of this wall separated by outlet are employed as pole pieces of magnetic system which form first interpole gap. Magnetic system includes pole pieces which form second interpole gap in the form of closed outlet along direction of emission of ions. Source of magnetomotive force is installed in space between two groups of magnetic poles. Ratio of width of each interpole gap to distance between pole pieces of first and second magnetic gaps along direction of emission of ions amounts to 0.05 or more. In correspondence with first variant of invention face wall of case on side opposite to outlet is made of magnetoconductive material and form open magnetic circuit together with pole pieces of first and second interpole gaps. In agreement with second variant pole pieces forming second interpole gap are electrically insulated from case and pole pieces forming first interpole gap. EFFECT: increased intensity of generated ion beam and energy of ions on condition that density of ion current is uniformly distributed over section of beam, provision for control over energy of ions in beam. 31 cl, 12 dwg