FIELD: laser equipment. SUBSTANCE: excimer laser has HCl generator placed into gas stream after getter as source of gaseous hydrogen chloride. Getter is used for preliminary pumping out of laser chamber which enables it to be free from all other systems of exhaust and regeneration. Getter is made on base of alkaline metals (Ba, Ca, Mg, Li, K, Na) or on their mixture. Lack of large supplies of gaseous haloide in cylinders of gas bleeding-in system enhances safety of operation of attending personnel and diminishes risk of ecological pollution of atmosphere. EFFECT: enhanced operational safety and diminished risk of ecological pollution. 3 dwg
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