METHOD OF REGENERATING GASEOUS MEDIUM OF EXCIMER LASER AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2024 - IPC H01S3/225 

FIELD: quantum electronics.

SUBSTANCE: invention relates to methods and devices for recovery of active medium of excimer laser. Excimer laser gas medium regeneration method and device consists in the fact that the spent gas mixture is supplied through the tube from the laser medium to the getter to ensure the reaction of the spent mixture with the Na getter, filling the upper compartment of the generator with the formed NaCl and feeding the formed pure noble gas into the active medium of the laser, The compartment with NaCl is moved to the lower position by turning the drum of the generator for its interaction with H₂SO₄ vapors, the obtained HCl is supplied to the active medium of the laser and ejected through Na₂SO₄ hole when the drum is turned.

EFFECT: higher safety.

2 cl, 4 dwg